China's first 3nm photolithography machine (China's first 3nm photolithography machine is that company)

This article catalogue at a glance:

• 1, Where is smee lithography?
2, 3. How many nanometres for the first lithography machine in China.

Where is the smee lithography?

The smee lithography machine is made by Tong Xing Da. On 1 February, Kunshan Tong Xing Da successfully held the moving-in ceremony of the first SMEE lithography machine.

China has photolithography, located in Shanghai, China's SMEE has developed with independent intellectual property rights of the projection type of mid-range photolithography, the formation of product series initially realised the domestic and international sales. Are in the process of other series of products of the R & D production work.

The first domestic lithography is Shanghai Microelectronics Equipment (Group) Co. Shanghai Microelectronics Equipment (Group) Co., Ltd (SMEE) is mainly dedicated to the development, design, manufacture, sales and technical service of semiconductor equipment, pan-semiconductor equipment and high-end intelligent equipment.

The company is located in Zhangjiang Hi-Tech Park, which is close to several national bases such as the National Integrated Circuit Industry Base, the National Semiconductor Lighting Industry Base and the National 863 Information Security Achievement Industrialisation Base.

... The first nanoscale photo-engraving of three-dimensional structures, what is the significance of this move for the development of photolithography ...

1, China's scientists for the first time to obtain nanoscale light engraving three-dimensional structure, the significance of this major discovery is to improve a level in scientific research, but also better to make the engraving technology more powerful.

2, this new technology, broke through the traditional femtosecond laser light diffraction limit, the light engraving lithium niobate three-dimensional structure of the size of the traditional 1 micron scale, for the first time reduced to the nanometer scale, to 30 nanometres, greatly improving the processing accuracy.

3, China's photolithography development has been close to the 28-nanometer lithography, can meet the daily RF chip, Bluetooth chip and other electrical appliances in some of the chip requirements and standards. But compared to Finland and other European and American countries, lithography chips, has reached a single-digit nanometre.

How many nanometres for the first domestic lithography machine

Nano. 2023 China has successfully developed its first domestically produced 28 nanometre (nm) lithography machine, which is expected to be ready for delivery by the end of the year, according to China's People's Daily.

smee lithography 28nm. Shanghai Microelectronics Equipment (SMEE) Co. has innovated its technology and announced the delivery of the first domestically produced 28-nm immersion-type lithography machine in 2021-2022, based on the previous 90-nm, according to media reports.

Nm. The domestically produced lithography machine has a maximum resolution of 90nm and a wavelength of 193nm, according to a query to industry.com. The most advanced model of the domestically produced lithography machine is the SSA60020 from Shanghai Microelectronics.