Lithography machines smaller than 5 nanometers.
Lithography machine technology is almost monopolized by the Dutch ASML. At present, the world's most advanced lithography machine has been able to achieve 5nm process, it is the Netherlands ASML company's extreme ultraviolet lithography machine (EUV), is currently the world's top lithography equipment.
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At present, the most advanced lithography machine in China should be 22nm, and its key components can be localized. But China has been able to achieve the mass production of 14nm chips, which is a major achievement for SMIC.