The 5nm will use the fifth-generation FinFET transistor technology, and the EUV extreme ultraviolet lithography technology will also be increased to more than 10 lithography layers, and the overall transistor density will be increased by 84%.
In other words, if 7 nanometers are 96.27 million transistors per square millimeter, 5 nanometers would be 177.1 million transistors per square kilometer. I hope my answer can help you. Thank you.