The target material is a precious metal target material. Precious metal target sputtering target of precious metal and its alloy of semiconductor devices, recording media display devices, etc. manufactured by refining, melting forging, calender processing or non-metallurgical process.
Au, Pt, Pd, Ag targets are used for integrated circuits and large-scale integrated circuits, and alloy targets such as CoCrPt, CoPt, and CoPd are used for magnetic recording.