Panel photoresist
Photoresist is the key material for LCD panel manufacturing, according to the different objects used, it can be divided into RGB glue, BM glue, OC glue, PS glue, TFT glue and so on.
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Panel photoresist mainly includes four categories: TFT wiring photoresist, LCD\/TP liner photoresist, color photoresist and black photoresist. Among them, the photoresist used for TFT wiring is used for ITO wiring, and the LCD\/TP precipitator photoresist is used to keep the liquid crystal material thickness between the two glass substrates of LCD constant. Color photoresist and black photoresist can give color filter color rendering function.
At present, KrF\/ArF is still the mainstream processing material. With the development of integrated circuits, lithography technology has experienced from G-wire (436nm) lithography, H-wire (405nm) lithography, I-wire (365nm) lithography, to deep ultraviolet DUV lithography (KrF248nm and ArF193nm), 193nm immersion plus multiple imaging technology (32nm-7nm), In the development of extreme ultraviolet (EUV, < 13.5nm) lithography, and even non-optical lithography (electron beam exposure, ion beam exposure), various photoresist with the corresponding wavelength as the sensitive wavelength are also applied.