duv lithography is theoretically capable of producing chips with processes above 22 nanometers. At present, there are two mainstream types of lithography machines, one is euv lithography machines, which produce high-end chips below 14 nm. The other is the mid-end duv lithography machine, using 193 nm deep ultraviolet light source, its highest process is 22 nm, but through multiple exposure can produce 14 nm chips, and even can produce chips close to 7 nm, but the yield is very low. Although the duv lithography machine is a low-end lithography machine, the vast majority of the world's chips are made by the duv lithography mechanism