As small as 100 square millimeters, as large as more than 40,000 square millimeters.
The size of the chip that the 65nm lithography machine can manufacture has little relationship with the process, and the chip design use is relatively large. In theory, the maximum production area of the 65nm lithography machine is the internal square of the silicon wafer, such as amd's thread ripper has more than 40,000 square millimeters, and the ordinary chip area is about 100 square millimeters.