The 7-nanometer lithography machine can produce 5-nanometer chips.
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At present, the high-end lithography machine to make 7 nanometer process chips is only produced by a Dutch Asmer, which is EUV lithography machine. At present, the minimum process of EUV lithography machine can reach 3 nm, TSMC and Samsung have technology and like TSMC 3 nm chip has received orders from Intel, and is currently improving the yield. As the previous generation of 193 nm light source, the DUV lithography machine can be processed to the equivalent of 10 nm accuracy through technical means, such as repeated exposure method.
7nm lithography machine can also produce 5nm chips, lithography machine is not in accordance with a certain process width to distinguish, strictly speaking, it is in a range of differentiation.
Chips below 14nm require extreme ultraviolet lithography, and only ASML in the Netherlands can mass-produce such lithography equipment. Among them, the latest NXE: 3400B\/C two models can simultaneously produce 7nm and 5nm process chips.