The lithography machine does not have a 01 nanometer process, so it is impossible to judge the size.
At present, the world's most high-end lithography machine is the euv13.5 nm extreme ultraviolet light source lithography machine of the Netherlands Asmer Company, which can be used to manufacture process chips below 22 nm, the highest accuracy is 3 nm, and the highest precision can be mass-produced is 4 nm. The 13.5 nm light source wavelength of the lithography machine itself is fixed, so it is currently impossible to have 01 or 0.1 nm lithography machines unless there is a light source with a smaller wavelength, but there is no light at this wavelength except for X-rays, which are currently unable to make lithography machines.