The 2g nanolithography machine can produce 14-3 nanometer chips.
The lithography machine does not have the brand or specifications of 2g, the lithography machine is basically divided into high and low end, the mid-end lithography machine can produce 45-22 nm chips, and the high-end lithography machine can produce chips below 14 nm. The mid-end lithography machine and some low-end lithography machines use 193 nm deep ultraviolet light source, and the high-end lithography machine uses 13.5 nm extreme ultraviolet light source. For high-end lithography machines, the current minimum process is the 4-nanometer chip released this year, and the minimum process that can flow but has not been mass-produced is 3 nanometers.