3nm chip lithography is a technology for manufacturing chips. Its principle is to irradiate the ultraviolet light source through the mask chip on the lithography layer, so that the adhesive layer is decomposed and deposited on the silicon chip below the mask chip, and finally form the circuit pattern on the chip.
In 3-nanometer chip lithography, because the accuracy of the mask chip is extremely high, the wavelength of the light source is also smaller, so that a smaller circuit pattern can be imprinted. Lithography is one of the key steps in chip manufacturing, which has a great impact on the performance and cost of the chip.