1. Projection scaling technology: First design the normal size circuit diagram, the circuit diagram must be strictly in accordance with the pixel design drawing, must be able to do not miss a pixel, and then use the projector to reduce the normal size circuit diagram projected on the microchip circuit board, with lithography machine lithography, printed circuit diagram accuracy is very harsh, every pixel in the circuit diagram can not be missed. It is like a large color oil painting out of the printing factory, or mobile phone photography pixels, the higher the pixel of the mobile phone, the clearer the photo video picture, for lithography technology, the higher the pixel of the normal size line map, the more fine the chip quality is after shrinking the chip on the small chip, the so-called fine, to put it bluntly, that is, can not miss a pixel. The normal circuit diagram is reduced to the nanoscale lithography on extremely small chips.
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2. Data scaling technology: The data lithography program is entered into the computer operation program in advance in the form of pixels during the normal size circuit diagram. First, the normal size circuit diagram is designed well. The circuit diagram must be designed in strict accordance with the strict height of the pixel points, so that no pixel is missed, and no more than one pixel point is produced. The reduced data program is input into the computer, which is just like the data program of the two-dimensional code. The computer inputs the computer operation program according to the normal size circuit diagram (original drawing) drawn in advance, through the scaled down data operation program, and the computer operation program controls the lithography machine to perform lithography on the tiny chip.
The lithography machine is an important chip manufacturing equipment, which uses optical technology to project the chip design pattern onto the lithography layer, and then transfers the pattern to the chip through chemical processing.
The chip engraving process of lithography machine mainly includes exposure, development, de-light and other steps, of which exposure is the most critical step, which determines the precision and quality of the chip.
During the exposure process, the lithography machine uses an ultraviolet light source to illuminate the photoresist, and forms the chip pattern by controlling the intensity and time of the light source. Steps such as developing and de-lighting then transfer the pattern to the chip, finally completing the chip manufacturing process.
A lithography machine is a device that makes chips through optical exposure technology. First, a silicon wafer is coated with a photosensitizer, and then a lithography machine is used to place the chip on the exposure table, and the optical system of the lithography machine is used to accurately expose the chip.
After exposure, the chip forms a pattern similar to a mask, which is then transferred to the chip surface through a subsequent process such as chemical etching to form a circuit. The high precision and high efficiency of lithography make it an important tool for manufacturing microchips.