No, it's 13.5 nm euv lithography.
The 3-nanometer chip does not use a 3-nanometer lithography machine, and there is no such device as a 3-nanometer lithography machine. At present, the chips below 7 nm are made by euv lithography mechanism, and some 14-7 nm are made by duv lithography mechanism. The euv lithography machine for manufacturing 3-nanometer chips is actually a 13.5-nanometer extreme ultraviolet light source lithography machine, which is achieved by the 3-nanometer process through multiple exposure technologies.