The world's lithography machine has achieved a minimum of 3nm.
At present, there are two companies in the world that can do 3nm process, one is TSMC and the other is Samsung.
At present, the world's lithography machines can achieve 14 nm and 5nm respectively according to different processes.
At present, the highest end of the EUV lithography machine wavelength 13.5nm, the exposure accuracy of 14nm, using the plane process, that is, 14nm, using the finfet process can reach below 5nm.
< br >
Dutch ASML company is the world's largest lithography machine manufacturer, is also the world's only manufacturer can provide EUV lithography machine, in the global high-end lithography machine market in a monopoly position.
At present, the minimum is 5nm, and there may be smaller ones in the lab, but it is not available