can not
1, the lithography machine is a very important equipment in the semiconductor process, the production of 28nm chip needs higher resolution and more precise processing process than 90nm, and the resolution and processing process of 90nm lithography machine can not meet the production requirements of 28nm chip. 2, at present, the production of 28nm chips requires lithography machines mainly 40nm and 28nm lithography machines, which have higher resolution, more sophisticated control systems and more efficient processing processes.
No, because the minimum processing size of 90nm lithography machine is only 90nm, and the line width of 28nm chip is 28nm, so 90nm lithography machine can not meet the requirements of 28nm chip production.
If you want to produce 28nm chips, you need to use a lithography machine with a minimum processing size of 28nm or more advanced process equipment to manufacture.
can
The domestic lithography machine, which reached 90nm three years ago, can produce 28nm process chips and is being used in large numbers.
In terms of accuracy, 90nm is certainly no problem, and after two exposures, you can get a 45nm chip, and three exposures can reach the highest level of about 22nm.