The name \"28nm lithography machine\" here is not the correct name, but the 193nm ArF infiltrating lithography machine, which refers to the lithography machine that can only be used to make 28nm chips, and the revelation that the lithography machine can make 7nm chips. However, due to the sanctions imposed by the U.S. semiconductor industry, the mass production of the lithography machine has been delayed. ArFi is infiltration ArF, also known as DUV. This time, we have high hopes for ArFi, which is generally used for 28nm and above processes internationally, so this may be the reason why it is called \"28nm lithography machine\". However, the FinFET process on ArFi can achieve 14nm, and the multiple exposure can achieve approximately 7nm.