The 0.1nm lithography machine is currently impossible to achieve.
For the current highest end euv lithography machine, the minimum limit is close to 1nm, which is the physical limit. 0.1nm is the physical size of the atom itself. Atomic sorting is impossible with current technology and hardware. From the 193nm water-layer infiltrating lithography machine to the 13.5nm tin drop technology lithography machine, the physical structure is actually going to the limit. In order to achieve this atomic level of 0.1nm integrated circuits, there must be a new generation of technology and new materials to be possible, but there is not yet.