About 180 tons.
First of all, there is no four-nanometer lithography machine, and the most advanced is the 13.5-nanometer ultra-ultraviolet euv lithography machine from the Dutch company Asmail. The lithography machine is currently manufactured by TSMC and Samsung and can produce four-nanometer process chips. The euv lithography machine is very large, its weight is up to 180 tons, and nearly 100,000 parts.