14nm chips need to be manufactured using 10nm or smaller lithography machines.
Lithography is one of the very important steps in the manufacture of chips, which is used to project circuit patterns onto a light-sensitive material on a silicon chip. The technology determines the minimum feature size of the chip, which is the nanometer scale of the manufacturing process. Therefore, the manufacturing process of the chip (such as 14nm or 10nm) determines the minimum feature size required, and also determines the resolution of the lithography machine required.
In the 14nm process, the lithography machine usually needs to have a resolution capability of 10nm or less. This means that the lithography machine can project the pattern onto the silicon wafer and achieve a line width of 10nm or less.
It is worth noting that lithography technology is a very critical and complex part of chip manufacturing, which not only involves the resolution of the lithography machine, but also includes many aspects such as mask production, exposure methods, and light sources. Therefore, under the different process nodes of chip manufacturing, the technology of lithography machines is also constantly developing and updating to adapt to the characteristics of smaller sizes and higher accuracy requirements.