Etching, NaURA, Micro and Micro companies, Yitang Semiconductor, their etching machines have been widely used in 28nm-3nm production lines;
Ion implantation, Beijing Zhongkexin's 12-inch ion implantation machine icon, has entered the SMIC production line, the process covers 28nm, Wanyye enterprise's Kaisitong ion implantation machine has broken through 3nm, the main parameters of the process is better than similar foreign products;
Film deposition, NAURA, Shenyang Tuojing equipment has been applied in the production process of SMIC 28nm chip;
Chemical mechanical polishing, Huahai Qingke 28nm process polishing machine has realized the industrialization of mature process application, 14nm process process has been in the experimental stage;
Cleaning, NAURA Chuang, Sheng Mei Semiconductor, to pure technology, core source micro cleaning equipment has achieved domestic replacement, among them, Sheng Mei Semiconductor equipment is the only domestic into the 14nm production line cleaning equipment manufacturers.