3nm
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First of all, it must be said that the lithography machine can not be distinguished by size, but by the type of process and light source wavelength. At present, the world's most high-end lithography machine, that is, the lithography mechanism with the smallest process, is the euv13.5 nm extreme ultraviolet light source lithography machine of the Netherlands Asmer company. At present, the lithography machine can produce chips with a commercial mass production process of 4 nm, and 3 nm chips have also been streaming.