The rgx60003 lithography machine can produce chips at the nanoscale. 1. This is because the rgx60003 lithography machine uses advanced lithography technology, has the characteristics of high precision and high resolution, and can achieve accurate exposure and manufacturing of nanoscale chips. 2. At present, the technical level of chip manufacturing continues to improve, and it has been able to produce nano-level chips, among which rgx60003 lithography machine is a widely used equipment, which has the ability to produce nano-chips. 3. Although the specific nanoscale size needs to take into account a variety of factors, such as material characteristics and process flow, but overall, the rgx60003 lithography machine can play an important role in the production of nanochips.