It refers to the mass production of 14nm chips.
Lithography machine 14nm mass production actually refers to the use of lithography machine can be mass produced 14nm chips, not 14nm process optical engraving machine equipment mass production. At present, the most high-end lithography machine is a lithography machine with 13.5nm extreme ultraviolet light source wavelength, and there is no lithography machine with 14nm light source wavelength. This type is generally used for high-end chips, such as 5nm and 7nm. The mass production of 14nm chips refers to the mass production of 14nm chips through the technology of duv lithography machine with a light source wavelength of 193nm.