1.28nm immersion lithography can produce chips of smaller sizes. 2. This is because nanoscale lithography machines have higher resolution and accuracy, and can manufacture smaller structures and components on the chip.
28 nm refers to the minimum line width or minimum feature size that the lithography machine can achieve.
3. With the progress of science and technology, the resolution of lithography machines continues to improve, and smaller chips can be produced. At present, 28 nm is not the most advanced technology, there are already smaller chips on the market, such as 7 nm, 5 nm and so on.
These smaller chips offer higher integration and performance.