It can be mass-produced at 14 nanometers.
At present, domestic chips can reach the commercial mass production stage of 14 nanometers. The strongest foundry for manufacturing chips in China is SMIC, which can currently achieve commercial mass production of chips with a 14-nanometer process. For example, Huawei hisilicon Kirin 717A chip is a 14-nanometer chip manufactured by SMIC. And SMIC can also make 7 nanometer chips, but the current yield is not high enough to mass produce.
China's SMIC lithography machine can do up to 14 nanometers.