The 7-nanometer lithography machine can produce 5-nanometer chips.
At present, the high-end lithography machine to make 7 nanometer process chips is only produced by a Dutch Asmer, which is EUV lithography machine. At present, the minimum process of EUV lithography machine can reach 3 nm, TSMC and Samsung have technology and like TSMC 3 nm chip has received orders from Intel, and is currently improving the yield. As the previous generation of 193 nm light source, the DUV lithography machine can be processed to the equivalent of 10 nm accuracy through technical means, such as repeated exposure method. Then 13.5nm light source EUV lithography machine can also improve the process of processing 7 nm, 5 nm, 3 nm and even more precise chips.