The source is the Dutch company Asmail lithography machine.
The source of SMIC's 14nm lithography machine is the Dutch company Asmer. To be precise, it is not 14 nm, but 28 nm lithography machine, 14 nm is SMIC's mass production chip manufacturing process, not the accuracy of the lithography machine. As a duv lithography machine, the highest accuracy is 28\/22 nanometers. At present, the Dutch Asmer lithography machine is almost in a global monopoly position, with a market share of more than 90%, and SMIC lithography machines are also owned by the Dutch Asmer company.