It can produce 7nm chips.
The 22nm lithography machine can produce chips of up to 7nm. The 22nm lithography machine, also known as the duv lithography machine, can produce 7nm chips through technical means such as multiple exposures. The first to use the duv lithography mechanism to create 7nm chips are TSMC and Samsung, and they are also the two companies in the world that can achieve 7nm mass production. Like Intel and SMIC can also use 22nm lithography mechanism to make 7nm chips, but the yield needs to be improved.