According to the lithography machine, there are other devices can produce chips.
1, because in the chip manufacturing process, in addition to the lithography machine for the transfer of patterns, other equipment is needed to complete different processes, such as cleaning equipment, centrifuges, evaporators, deposition equipment, etc., which play an important role in the chip manufacturing process.
2, lithography machines are mainly used for precision pattern production of chips, but other equipment also plays a key role in material handling, film deposition, electron beam exposure, and so on.
Therefore, in addition to the lithography machine, other equipment is essential in the chip production.
In addition to lithography machines, there are many other devices that can be used for chip production. For example, the chemical vapor deposition machine is used to deposit thin films, the ion implantation machine is used to dopant materials, the film deposition machine is used to prepare the film, the scanning electron microscope is used to check the quality of the chip, the chemical mechanical polishing machine is used to smooth the surface, and the electron beam evaporation machine is used to prepare the metal film. These devices play an important role in the chip manufacturing process, ensuring the quality and performance of the chip.
In addition to the lithography machine, there are other equipment to produce chips, and the equipment required for manufacturing chips includes lithography machine, plasma etching machine, ion implantation machine, reactive ion etching system, single crystal furnace, wafer slicing machine, wafer thinning machine and gas phase epitaxial furnace equipment.
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Chip manufacturing is a very complex process, the production of different chips have different production processes, will also use different equipment.