At present, the most advanced chip manufacturing equipment is the Dutch company ASML's extreme ultraviolet lithography machine (EUV), which uses the most advanced technology and process, can reduce the feature size of the chip to a few nanometers, and is a necessary equipment for the manufacture of high-end chips.
In addition, the electron beam lithography machine of Perseverance Technology Company in Tokyo, Japan, is also one of the most advanced chip manufacturing equipment, which can achieve higher resolution and more precise process control.