MEMS is a Micro-Electro-Mechanical system (micro-electro-mechanical SySTems) that can be mass-produced and integrates micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, interfaces, communications and power supplies. MEMS is developed with the development of semiconductor integrated circuit micro-machining technology and ultra-precision machining technology, and MEMS processing technology is also widely used in microfluidic chips and synthetic biology and other fields, so as to carry out the chip integration of laboratory technology processes such as biochemistry.
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MEMS mainly includes micro-mechanism, micro-sensor, micro-actuator and corresponding processing circuit and other parts, it is a high-tech frontier subject developed on the basis of integrating a variety of micro-machining technology and applying the latest achievements of modern information technology.